Pure Hydrogen Gas For MOCVD Equipments

Posted on: 12 Oct, 2012   |   With: 0 Comments
Category:  Gas Purification, Hydrogen

Metalorganic Vapour Phase Epitaxy (MOVPE), or Metalorganic Chemical Vapour Deposition (MOCVD), is a method of chemical vapour deposition and it is used to create semiconductor multilayer structures.

For this process the Ultra Pure Hydrogen gas is required. Getting ultra pure gas of consistent purity is a challenge.

MVS Engineering offers two options for achieving the desired purity and these are discussed below:

  1. Directly by Proton Hydrogen generator:

    MVS offers USA manufactured Hydrogen Generators from Proton Onsite. Proton’s Hydrogen Generators offer Ultra-High Purity Hydrogen (99.9995% or better) straight from the unit without requiring any additional purifier. In case you are using any “Getters” for further purification, then using Proton Hydrogen Generator as your source of Hydrogen greatly increases the life of the getter since the Hydrogen being fed into the getter is ultra-pure.

  2. By Hy9 Palladium Purifier:

    MVS has collaboration with Hy9 Corporation, U.S.A. for Palladium Purifiers. We offer standalone purification systems with the Hy9 palladium purifier inside. These purifiers are suitable to give 99.9999%+ purity and hence Hydrogen can be directly fed into the MOCVD reactor. In case you are using Hydrogen from cylinders, you can either use commercial grade Hydrogen (99.9% pure) or technical grade Hydrogen (99.99%) and integrate our purifier. Since the cost differential between commercial grade and UHP-grade Hydrogen in the Indian market is quite substantial, you can recover cost on this investment in as little as 9-months.

Both the options offers a great value preposition according to the need and economic viability.

About MVS Engineering Limited

MVS Engineering is a turnkey supplier of Gas generation equipment, Air and liquid drying equipment. MVS was founded in 1977 and has supplied nearly 7000 Skid mounted units worldwide. Read more about the company in the About Us section of our website.

Specifically for Proton OnSite’s products, MVS is Proton’s engineering partner in India for sales, service and turnkey supply of engineered solutions. Whether you require a single Hydrogen Generator or a complete Hydrogen solution including compression, bottle filling etc., MVS is your one stop provider.

About Proton OnSite, USA

Proton Onsite designs and manufactures Proton Exchange Membrane (PEM) electrochemical systems to make hydrogen from water in a zero pollution process producing safe, pure, reliable onsite hydrogen to meet today?s global hydrogen requirements. Proton has been developing and manufacturing world-class electrolysis systems since 1996, with thousands of units deployed world-wide, on every continent. With a reputation for building robust, reliable, and safe systems, federal, state, and commercial partners repeatedly seek the creative solutions that Proton OnSite has proven it is capable of delivering. For more information, visit

About Hy9 Corporation

Hy9 is the leader in the development and marketing of Hydrogen purification membranes and point-of-use pure hydrogen generation for clients who require high-performance solutions to their critical power needs. With over 10 years of experience, Hy9 clients benefit from high reliability and high performance. Hy9 ? Making Hydrogen Pure and Simple?

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